Micro Materials Center Berlin
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T3 - Developments and trends in micro and nano testing methods

Tutorial title:

Developments and trends in micro and nano testing methods

Organizer:

Dr. H. Walter, AMIC GmbH Berlin

Instructor(s):
to be confirmed

Dr. D. Vogel, Fraunhofer IZM, Micro Materials Center Berlin and Chemnitz

Dr. J. Maultzsch, TU Berlin

Dr. U. Hangen, Hysitron

Dr. A. Wilkinson, University of Oxford, UK

Dr. F. Reischer, Carl Zeiss micro imaging GmbH

Dr. O. Kahle, Fraunhofer IZM, EPC Teltow

Dr. H. Roth, Phoenix X-ray

Dr. H. Walter, AMIC GmbH Berlin

Importance of topic:

Rapid development of new concepts in the field of microsystem technology leads to improved systems with smaller and more complex structures, new materials and with an increasing number of multi-layer stacks, which have to fulfill elevated criteria concerning reliability requirements. Effective applications of materials demand an improved acquisition and use of material properties. Consequently, the requirements for new test and characterization methods become more versatile and have to take into account miniaturization issues.

Aim of course:

This tutorial will be a forum for recent developments of new testing strategies and equipment for materials in microscopic and nanoscopic dimensions, mainly with respect to reliability and life-time evaluations. The tutorial intends to disseminate some of the new approaches realized by equipment manufactures and research institutions, rather than giving a complete introduction to testing methods, new materials testing and characterization approaches for micro/nano system technology. The tutorial includes a review on methods of nanoindentation, X-ray tomography, laser scanning microscopy, thin layer TMA/TGA/DVS, micro-/nanoRaman and residual stress analysis (EBSD and stress release based approaches).

Who should attend:

A benefit will be derived from this course by engineers, scientists, managers and technologists from industry, research institutes and universities, who are involved in materials manufacturing, research as well as development.

Outline:

  • Overview on methods applied for materials characterization and testing on micro and nano scale
  • Some of the essential methods and developments are presented in detail by experts in the respective fields. Among them are:
    • NanoIndentation
    • Nano X-ray Tomography (nanoCT)
    • Laser Scanning Microscopy
      • Analysis of 3D microstructure
    • Thermophysical characterisation of sub-µm polymer layers by Nano-TMA/TGA/DVS
      • Temperature ellipsometry
    • Micro-/NanoRAMAN methods
    • Electron Back Scatter Diffraction
      • Hough Transform based orientation mapping
      • Cross-Correlation based strain mapping
      • Example applications to functional and structural materials
    • Highly localized measurement of residual stress by stress release techniques (fibDAC)
      • Material deformation due to stress release by FIB feature milling
      • Extraction of residual stresses from deformation fields measured by DIC technique, benefits and challenges
      • First application examples of the fibDAC method
About the instructor

Dietmar Vogel studied physics and received his PhD in plasma physics from St. Petersburg State University in 1980. Since 1993, he has been working with the Fraunhofer Institute for Reliability and Microintegration Berlin (IZM). He is Head of the Fraunhofer Nanomechanics Lab Berlin Adlershof, and of the research group on characterization of micro and nano systems, both a a division of the Micro Materials Center Berlin/Chemnitz. His main research field is in experimental micro and nano mechanics with a special emphasis on measuring techniques. For his work to improve reliability in micro- and nanotechnologies by means of nanodeformation analysis (nanoDAC), Dietmar Vogel received (together with his co-workers Bernd Michel and Juergen Keller) the Joseph-von-Fraunhofer-Prize 2005, labelled "Reliable to the Nanometer", very recently.

Franz Reischer studied materials science and received his Ph. D. from the Technical University Bergakademie Freiberg in the field of composite materials. Thereafter he started to work for Carl Zeiss MicroImaging GmbH as a product manager for laser scanning microscopy.

Olaf Kahle studied physics and received Ph. D. in physics from Brandenburg University of Technology Cottbus in 2002. Since 1996 he has been working at Fraunhofer IFAM and IZM, Branch lab Polymeric Materials and Composites in Teltow and since 2000 at Brandenburg University of Technology Cottbus. His main research field are thermophysical and mechanical properties of polymers, thin film and surface characterization, fracture mechanical characterization.

Janina Maultzsch received her PhD in physics from the Technical University Berlin in 2004. Since then she has been working as a researcher at TU Berlin and at Columbia University (USA). Her main research interests are the optical, electronic and vibrational properties of low-dimensional nanostructures, in particular carbon nanotubes and few-layer graphite. Her methods include (micro-/nano-) Raman spectroscopy among other optical techniques, as well as theoretical methods like ab-initio calculations.

Ude Hangen studied Physics at the RWTH-Aachen and received Ph. D. in 1998 for Investigations on solid-state phase transformations at the MPI for Iron Research in Duesseldorf. Since than he has been working on different aspects of materials characterization by scanning probe microscopy and nanoIndentation.

Dr. Holger Roth, born 1962, holds a doctorate degree in Physics issued by the University of Kaiserslautern, Germany. He is head of phoenix|x-ray´s branch office Stuttgart which hosts an application laboratory, a service centre and a part of the marketing department. He has been working for phoenix|x-ray since the company´s foundation in April 1999.

Hans Walter received his Diploma Degree in Mechanical Science from Martin-Luther-University, Halle-Wittenberg, Germany, in 1995. From 1995 to 1999, he was a staff member of the Department of Engineering Science at Martin-Luther-University. In 1995, he also joined the Fraunhofer Institute for Reliability and Microintegration (IZM), Berlin, who is still a member of today. He received his Ph.D. in Materials Science from the Martin-Luther-University, Halle-Wittenberg, in 2003. Since 2000, he has been co-working with the Angewandte Micro Messtechnik GmbH (AMIC), Germany.He is currently involved with thermo-mechanical characterisation and experimental determination of fracture behaviour of materials and components. He is head of the µ-Materials Testing Lab.

Angus J Wilkinson studied Chemical Physics (B.Sc. 1987) at the University of Bristol, where he continued to study for Ph.D. (1991) in the Department of Engineering. In 1991 he moved to the Department of Materials, University of Oxford, where he has been a Royal Society University Research Fellow, and is currently a University Lecturer, and Fellow of St Cross College. He has been involved in development of SEM based diffraction techniques: electron back scatter diffraction and electron channelling contrast imaging. His research applies these techniques and many others to micromechanical characterisation of a wide range of materials, both functional and structural.

 
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