Tutorial title: |
Failures
modes and effects of failures in MEMS |
Organizer: |
MIcrosystems Engineering Centre (MISEC), Heriot-Watt
University |
Instructor(s): |
Prof. Marc Desmulliez,
Mr. Srikanth Lavu
|
Importance
of topic: |
The reliability of MEMS is directly related to the occurrence and
severity of failures occurring at the manufacturing, operation of the device.
It is surprising that little has been done to fully classify these failures.
A methodology is also proposed to assess their severity and high level design
of failures is implemented in the case of a thermal actuator. |
Aim of
course: |
The course aims to provide a near exhaustive taxonomy of the failure
modes occurring in MEMS with illustrated examples on how these failures
occur. It also provides a methodology based on FMEA, used extensively in
automotive engineering, on how to tackle the severity of such failures. The
course aims also to demonstrate the benefits of high level design of failures
as applied to two specific case studies. |
Who should
attend: |
This course will benefit MEMS manufacturers and end users. It will
also provide valuable information to MEMS designers and those engineers
specialised in packaging of MEMS. |
Outline: |
- Taxonomy
of failure modes and some examples
- The
use of Failure Modes and Effect Analysis (FMEA) in MEMS
- High
level simulation of failure modes using VHDL-AMS
- Two
case studies : an electrostatic micromotor and a
thermal actuator
|
| About the instructors |
Prof. Marc Desmulliez is the Director of the MIcroSystems Engineering Centre (MISEC) which regroups 6
permanent academic members of staff and over 30 Ph.D. and Research
Associates. The group is specialised in UV-LIGA processing, high level design
of Microsystems and advanced packaging of MEMS. Prof. Marc Desmulliez was born in
France
,
graduated from SUPELEC in
Paris and studied in
London,
Cambridge
and Heriot-Watt
University,
Edinburgh,
Scotland
.
He is currently the Head of the Electrical Engineering Department of that
University. Mr. Srikanth Lavu has been involved in failure modes of MEMS for over 3 years in the context of
a Ph.D. in high level design of MEMS. He is actively involved in the Network
of Excellence Patent DfMM (Design for Manufacture
of Microsystems). |
